Patent Assignment Details
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| Reel/Frame: | 010460/0412 | |
| Pages: | 3 |
| | Recorded: | 12/23/1999 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/12/2004
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Application #:
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09425015
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Filing Dt:
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10/25/1999
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Publication #:
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Pub Dt:
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03/27/2003
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Title:
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GAS SUPPLY PATH STRUCTURE, GAS SUPPLY METHOD, LASER OSCILLATING APPARATUS, EXPOSURE APPARATUS, AND DEVICE PRODUCTION METHOD
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Assignee
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| 30-2, SHIMOMARUKO 3-CHOME, OHTA-KU |
| TOKYO, JAPAN |
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Correspondence name and address
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FITZPATRICK, CELLA, HARPER & ETAL
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LAURA A. BAUER
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30 ROCKEFELLER PLAZA
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NEW YORK, NEW YORK 10112-3801
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