Patent Assignment Details
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| Reel/Frame: | 010476/0582 | |
| Pages: | 4 |
| | Recorded: | 12/21/1999 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/24/2001
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Application #:
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09467389
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Filing Dt:
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12/21/1999
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Title:
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METHOD OF MINIMIZING REACTIVE ION ETCH DAMAGE OF ORGANIC INSULATING LAYERS IN SEMICONDUCTOR FABRICATION
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Assignee
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| 4000 NORTH FIRST STREET, M/S 280 |
| SAN JOSE, CALIFORNIA 95134 |
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Correspondence name and address
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SKJERVEN, MORRILL, MACPHERSON, ET AL
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ROBERTA P. SAXON
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25 METRO DRIVE, SUITE 700
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SAN JOSE, CALIFORNIA 95110
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