Patent Assignment Details
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Reel/Frame: | 010481/0049 | |
| Pages: | 2 |
| | Recorded: | 12/23/1999 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/14/2003
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Application #:
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09471590
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Filing Dt:
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12/23/1999
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Publication #:
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Pub Dt:
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08/22/2002
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Title:
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METHOD FOR CONTROLLING AIRFLOW ON A BACKSIDE OF A SEMICONDUCTOR WAFER DURING SPIN PROCESSING
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Assignee
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4650 CUSHING PARKWAY |
FREMONT, CALIFORNIA 94538 |
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Correspondence name and address
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MARTINE PENNILLA & KIM, LLP
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PETER B. MARTINE
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710 LAKEWAY DRIVE
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SUITE 170
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SUNNYVALE, CA 94086
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