|
Total properties:
13
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/13/2001
|
Application #:
|
09006409
|
Filing Dt:
|
01/13/1998
|
|
Title:
|
METHOD OF PURIFYING PHOTOACID GENERATORS FOR USE IN PHOTORESIST COMPOSITIONS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/22/2000
|
Application #:
|
09008671
|
Filing Dt:
|
01/16/1998
|
|
Title:
|
PROCESS FOR PRERARING A RADIATION-SENSETIVE COMPOSITION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/21/2000
|
Application #:
|
09019958
|
Filing Dt:
|
02/06/1998
|
|
Title:
|
PHOTOSENSITIVE DIAZONAPHTHOQUINONE ESTERS BASED ON SELECTED CYCLIC ALKYL ETHER-CONTAINING PHENOLICS AND THEIR USE IN RADIATION SENSITIVE MIXTURES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/12/2001
|
Application #:
|
09055630
|
Filing Dt:
|
04/06/1998
|
|
Title:
|
METHOD FOR REMOVING PHOTORESIST AND PLASMA ETCH RESIDUES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/12/2000
|
Application #:
|
09059864
|
Filing Dt:
|
04/14/1998
|
|
Title:
|
PRODUCTION OF ACETAL DERIVATIZED HYDROXYL AROMATIC POLYMERS AND THEIR USE IN RADIATION SENSITIVE FORMULATIONS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/29/2000
|
Application #:
|
09081840
|
Filing Dt:
|
05/19/1998
|
|
Title:
|
CLEANING COMPOSITION AND METHOD FOR REMOVING RESIDUES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/01/2000
|
Application #:
|
09082564
|
Filing Dt:
|
05/21/1998
|
|
Title:
|
NON-CORROSIVE CLEANING COMPOSITION FOR REMOVING PLASMA ETCHING RESIDUE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/31/2001
|
Application #:
|
09135809
|
Filing Dt:
|
08/18/1998
|
|
Title:
|
NON-CORROSIVE STRIPPING AND CLEANING COMPOSITION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/04/2000
|
Application #:
|
09151218
|
Filing Dt:
|
09/10/1998
|
|
Title:
|
NEGATIVELY ACTING PHOTORESIST COMPOSITION BASED ON POLYIMIDE PRECURSORS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/28/2000
|
Application #:
|
09178827
|
Filing Dt:
|
10/26/1998
|
|
Title:
|
RADIATION SENSITIVE COMPOSITIONS OF TERPOLYMERS CONTAINING ORGANOSILICON SIDE CHAINS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/22/2000
|
Application #:
|
09178828
|
Filing Dt:
|
10/26/1998
|
|
Title:
|
TERPOLYMERS CONTAINING ORGANOSILICON SIDE CHAINS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/06/2000
|
Application #:
|
09186916
|
Filing Dt:
|
11/06/1998
|
|
Title:
|
PREPARATION OF PARTIALLY CROSS-LINKED POLYMERS AND THEIR USE IN PATTERN FORMATION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/15/2000
|
Application #:
|
09224493
|
Filing Dt:
|
12/31/1998
|
|
Title:
|
NON-CORROSIVE CLEANING COMPOSITION AND METHOD FOR REMOVING PHOTORESIST AND/OR PLASMA ETCHING RESIDUES
|
|
