Patent Assignment Details
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| Reel/Frame: | 010551/0704 | |
| Pages: | 4 |
| | Recorded: | 01/19/2000 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/13/2002
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Application #:
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09428264
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Filing Dt:
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10/27/1999
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Title:
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METHOD AND APPARATUS FOR ELIMINATING DISPLACEMENT CURRENT FROM CURRENT MEASUREMENTS IN A PLASMA PROCESSING SYSTEM
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Assignee
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| 35 DORY ROAD |
| GLOUCESTER, MASSACHUSETTS 01930 |
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Correspondence name and address
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VARIAN SEMICONDUCTOR EQUIPMENT
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ASSOCIATES, INC.
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GARY L. LOSER
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35 DORY ROAD
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GLOUCESTER, MA 01930
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