Patent Assignment Details
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| Reel/Frame: | 010554/0511 | |
| Pages: | 5 |
| | Recorded: | 01/26/2000 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/01/2003
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Application #:
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09491853
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Filing Dt:
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01/26/2000
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Title:
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APPARATUS AND METHOD FOR DEPOSITING SUPERIOR TA(N)/COPPER THIN FILMS FOR BARRIER AND SEED APPLICATIONS IN SEMICONDUCTOR PROCESSING
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Assignee
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| 3970 NORTH FIRST STREET |
| SAN JOSE, CALIFORNIA 95134 |
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Correspondence name and address
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DELIO & PETERSON, LLC
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SHIRLEY S. MA
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121 WHITNEY AVENUE
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NEW HAVEN, CT 06510-1241
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