Patent Assignment Details
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Reel/Frame: | 010598/0761 | |
| Pages: | 4 |
| | Recorded: | 02/25/2000 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/06/2002
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Application #:
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09513308
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Filing Dt:
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02/25/2000
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Title:
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Fiducial mark bodies for charged-particle-beam (CPB) microlithography, methods for making same, and CPB microlithography apparatus comprising same
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Assignee
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FUJI BUILDING |
2-3 MARUNOUCHI 3-CHOME |
CHIYODA-KU, TOKYO 100, JAPAN |
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Correspondence name and address
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KLARQUIST SPARKMAN CAMPBELL, ET AL
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DONALD L. STEPHENS, JR.
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ONE WORLD TRADE CENTER, STE. 1600
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121 S.W. SALMON STREET
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PORTLAND, OREGON 97204-2988
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