Patent Assignment Details
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Reel/Frame: | 010603/0035 | |
| Pages: | 3 |
| | Recorded: | 02/10/2000 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/09/2001
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Application #:
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09501967
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Filing Dt:
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02/10/2000
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Title:
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Repeatable end point method for anisotropic etch of inorganic buried anti-reflective coating layer over silicon
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Assignee
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STREET 2 |
60 WOODLANDS INDUSTRIAL PARK D |
SINGAPORE, SINGAPORE 73840 |
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Correspondence name and address
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GEORGE O. SAILE
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20 MCINTOSH DRIVE
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POUGHKEEPSIE, NY 12603
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