Patent Assignment Details
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| Reel/Frame: | 010631/0894 | |
| Pages: | 2 |
| | Recorded: | 03/08/2000 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/04/2001
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Application #:
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09521649
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Filing Dt:
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03/08/2000
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Title:
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Flat antenna having openings provided with conductive materials accommodated therein an plasma processing apparatus using the flat antenna
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Assignee
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| 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO 107-8481, JAPAN |
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Correspondence name and address
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PILLSBURY MADISON & SUTRO LLP
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GLENN J. PERRY
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INTELLECTUAL PROPERTY GROUP
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1100 NEW YORK AVENUE, NW, NINTH FLOOR
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WASHINGTON, DC 20005-3918
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