Patent Assignment Details
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| Reel/Frame: | 010643/0370 | |
| Pages: | 3 |
| | Recorded: | 02/23/2000 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/12/2002
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Application #:
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09511276
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Filing Dt:
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02/23/2000
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Title:
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Gas-phase additives for an enhancement of lateral etch component during high density plasma film deposition to improve film gap-fill capability
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Assignee
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| 60 WOODLANDS INDUSTRIAL PARK D STREET 2 |
| SINGAPORE, SINGAPORE 73840 |
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Correspondence name and address
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GEORGE O. SAILE
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20 MCINTOSH DRIVE
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POUGHKEEPSIE, NY 12603
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