Patent Assignment Details
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| Reel/Frame: | 010693/0454 | |
| Pages: | 3 |
| | Recorded: | 03/29/2000 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/31/2002
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Application #:
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09538443
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Filing Dt:
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03/29/2000
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Title:
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SYSTEM LEVEL IN-SITU INTEGRATED DIELECTRIC ETCH PROCESS PARTICULARLY USEFUL FOR COPPER DUAL DAMASCENE
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Assignee
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| LEGAL AFFAIRS DEPARTMENT |
| P.O. BOX 450A |
| SANTA CLARA, CALIFORNIA 95052 |
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Correspondence name and address
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APPLIED MATERIALS, INC.
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ROBERT W. MULCAHY
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LEGAL AFFAIRS DEPARTMENT
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P.O BOX 450A, M/S 2061
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SANTA CLARA, CA 95052
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