Patent Assignment Details
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Reel/Frame: | 010707/0543 | |
| Pages: | 3 |
| | Recorded: | 04/10/2000 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09546485
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Filing Dt:
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04/10/2000
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Publication #:
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Pub Dt:
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11/22/2001
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Title:
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Method for dry-etching a titanium nitride containing multilayer film
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Assignee
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7-1, SHIBA 5-CHOME, MINATO-KU |
TOKYO, JAPAN |
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Correspondence name and address
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HELFGOTT & KARAS, P.C.
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AARON B. KARAS
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350 FIFTH AVENUE, 60TH FLOOR
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SUITE 6024
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NEW YORK, NY 10118
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