Patent Assignment Details
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Reel/Frame: | 010735/0478 | |
| Pages: | 3 |
| | Recorded: | 04/03/2000 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/06/2001
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Application #:
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09187911
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Filing Dt:
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11/06/1998
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Title:
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WAFER CHAMBER HAVING A GAS CURTAIN FOR EXTREME-UV LITHOGRAPHY
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Assignee
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SUITE SCI-02 |
2200 MISSION COLLEGE BLVD. |
SANTA CLARA, CALIFORNIA 95052 |
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Correspondence name and address
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SANDIA NATL. LABS
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KURT C. OLSEN
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P.O. BOX 969
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MS 9031
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LIVERMORE, CA 94551-0969
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