Patent Assignment Details
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Reel/Frame: | 010740/0466 | |
| Pages: | 2 |
| | Recorded: | 03/30/2000 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/26/2002
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Application #:
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09539294
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Filing Dt:
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03/30/2000
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Title:
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Enhanced resist strip in a dielectric etcher using downstream plasma
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Assignee
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4650 CUSHING PARKWAY |
FREMONT, CALIFORNIA 94538 |
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Correspondence name and address
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BEYER WEAVER & THOMAS LLP
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MICHAEL LEE
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P.O.BOX 130
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MOUNTAIN VIEW, CA 94042-0130
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