Patent Assignment Details
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| Reel/Frame: | 010749/0590 | |
| Pages: | 3 |
| | Recorded: | 04/25/2000 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/25/2001
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Application #:
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09557695
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Filing Dt:
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04/25/2000
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Title:
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Etchant mixing system for edge bevel removal of copper from silicon wafers
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Assignee
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| 3970 NORTH FIRST STREET |
| SAN JOSE, CALIFORNIA 95134 |
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Correspondence name and address
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BEYER WEAVER & THOMAS, LLP
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JEFFREY K. WEAVER
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P.O. BOX 130
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MOUNTAIN VIEW, CA 94042-0130
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