Patent Assignment Details
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| Reel/Frame: | 010751/0769 | |
| Pages: | 4 |
| | Recorded: | 04/26/2000 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/08/2002
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Application #:
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09559904
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Filing Dt:
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04/26/2000
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Title:
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Charged-particle-beam microlithography methods exhibiting improved pattern-feature accuracy, and device manufacturing methods comprising same
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Assignee
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| MARUNOUCHI 3-CHOME, CHIYODA-KU |
| FUJI BUILDING, 2-3 |
| TOKYO 100, JAPAN |
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Correspondence name and address
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KLARQUIST, SPARKMAN CAMPBELL, ET AL.
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DONALD L. STEPHENS, JR.
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ONE WORLD TRADE CENTER, SUITE 1600
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321 S.W. SALMON STREET
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PORTLAND, OR 97204-2988
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