Patent Assignment Details
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Reel/Frame: | 010757/0025 | |
| Pages: | 3 |
| | Recorded: | 04/11/2000 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/05/2002
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Application #:
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09547359
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Filing Dt:
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04/11/2000
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Title:
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Correction of wafer temperature drift in a plasma reactor based upon continuous wafer temperature measurements using and in-situ wafer temperature optical probe
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Assignee
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LEGAL AFFAIRS DEPARTMENT - M/S 2061 |
P.O. BOX 450A |
SANTA CLARA, CALIFORNIA 95052 |
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Correspondence name and address
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APPLIED MATERIALS, INC.
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ROBERT W. MULCAHY, PAENT COUNSEL
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LEGAL AFFAIRS DEPARTMENT -M/S 2061
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P.O. BOX 450A
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SANTA CLARA, CA 95052
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