Patent Assignment Details
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| Reel/Frame: | 010757/0126 | |
| Pages: | 3 |
| | Recorded: | 04/11/2000 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/16/2002
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Application #:
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09547173
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Filing Dt:
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04/11/2000
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Title:
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METHOD AND APPARATUS FOR REAL-TIME CORRECTION OF RESIST HEATING IN LITHOGRAPHY
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Assignee
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| 26460 CORPORATE AVENUE |
| HAYWARD, CALIFORNIA 94545 |
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Correspondence name and address
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SKJERVEN, MORRILL, MACPHERSON ET AL.
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GEORGE WOLKEN, JR.
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25 METRO DRIVE, SUITE 700
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SAN JOSE, CA 95110
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