Patent Assignment Details
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| Reel/Frame: | 010784/0607 | |
| Pages: | 3 |
| | Recorded: | 05/09/2000 | | |
| Conveyance: | CONFIRMATORY LICENSE (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/16/1999
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Application #:
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08963520
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Filing Dt:
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11/03/1997
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Title:
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SEMICONDUCTOR ETCHING BY HYPERTHERMAL NEUTRAL BEAMS
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Assignee
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| 300 "E" STREET, SW., CODE GP |
| WASHINGTON, DISTRICT OF COLUMBIA 20546 |
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Correspondence name and address
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NATIONAL AERONAUTICS AND SPACE ADMIN
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KATHY BAYER
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300 "E" STREET SW, CODE GP
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WASHINGTON, DC 20546
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