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Patent #:
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Issue Dt:
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07/19/1983
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Application #:
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06129214
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Filing Dt:
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03/11/1980
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Title:
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FRICTION DRIVE
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Patent #:
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Issue Dt:
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08/03/1982
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Application #:
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06176875
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Filing Dt:
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08/11/1980
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Title:
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PLASMA ETCHING ELECTRODE
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Patent #:
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Issue Dt:
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05/17/1983
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Application #:
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06183402
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Filing Dt:
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09/02/1980
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Title:
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OPTICAL FOCUSING SYSTEM
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Patent #:
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Issue Dt:
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01/10/1984
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Application #:
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06198364
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Filing Dt:
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10/20/1980
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Title:
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X-Y ADDRESSABLE WORKPIECE POSITIONER AND MASK ALIGNER USING SAME
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Patent #:
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Issue Dt:
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06/21/1983
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Application #:
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06200780
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Filing Dt:
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10/27/1980
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Title:
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ILLUMINATION SYSTEM
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Patent #:
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Issue Dt:
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12/06/1983
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Application #:
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06283507
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Filing Dt:
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07/14/1981
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Title:
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TREATING WORKPIECE WITH BEAMS
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Patent #:
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Issue Dt:
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11/08/1983
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Application #:
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06288680
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Filing Dt:
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07/31/1981
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Title:
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GAS BEARING
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Patent #:
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Issue Dt:
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12/06/1983
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Application #:
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06362929
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Filing Dt:
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03/29/1982
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Title:
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LOAD LOCK VALVE
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Patent #:
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Issue Dt:
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03/12/1985
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Application #:
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06420557
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Filing Dt:
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09/20/1982
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Title:
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LASER BEAM PLASMA PINCH X-RAY SYSTEM
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Patent #:
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Issue Dt:
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01/29/1985
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Application #:
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06543432
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Filing Dt:
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10/19/1983
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Title:
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GAS BEARING
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Patent #:
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Issue Dt:
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04/01/1986
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Application #:
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06594756
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Filing Dt:
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03/29/1984
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Title:
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SCANNING TREATMENT APPARATUS
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Patent #:
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Issue Dt:
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09/03/1985
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Application #:
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06625263
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Filing Dt:
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06/27/1984
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Title:
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DOSE CONTROL METHOD
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Patent #:
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Issue Dt:
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04/30/1985
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Application #:
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06640538
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Filing Dt:
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08/13/1984
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Title:
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ION TREATMENT APPARATUS
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Patent #:
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Issue Dt:
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05/06/1986
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Application #:
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06719834
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Filing Dt:
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04/03/1985
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Title:
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DOSE CONTROL APPARATUS
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Patent #:
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Issue Dt:
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05/19/1987
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Application #:
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06735326
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Filing Dt:
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05/17/1985
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Title:
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ACCELERATOR FOR ION IMPLANTATION
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Patent #:
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Issue Dt:
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12/09/1986
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Application #:
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06742492
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Filing Dt:
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06/07/1985
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Title:
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PARTICLE IMPLANTATION APPARATUS AND METHOD
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Patent #:
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Issue Dt:
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06/23/1987
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Application #:
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06753736
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Filing Dt:
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07/11/1985
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Title:
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CHARGE DENSITY DETECTOR FOR BEAM IMPLANTATION
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Patent #:
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Issue Dt:
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10/27/1987
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Application #:
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06805952
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Filing Dt:
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12/05/1985
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Title:
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ION IMPLANTATION CHAMBER PURIFICATION METHOD AND APPARATUS
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Patent #:
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Issue Dt:
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02/09/1988
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Application #:
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06855191
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Filing Dt:
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04/23/1986
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Title:
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ADHESION COOLING FOR AN ION IMPLANTATION SYSTEM
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Patent #:
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Issue Dt:
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04/05/1988
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Application #:
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06911238
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Filing Dt:
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09/24/1986
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Title:
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ION BEAM IMPLANTER SCAN CONTROL SYSTEM
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Patent #:
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Issue Dt:
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08/02/1988
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Application #:
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06911240
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Filing Dt:
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09/24/1986
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Title:
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ION BEAM IMPLANTATION DISPLAY METHOD AND APPARATUS
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Patent #:
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Issue Dt:
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02/14/1989
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Application #:
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07032513
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Filing Dt:
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03/30/1987
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Title:
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TREATING WORK PIECES WITH ELECTRO-MAGNETICALLY SCANNED ION BEAMS
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Patent #:
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Issue Dt:
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07/26/1988
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Application #:
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07049759
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Filing Dt:
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05/12/1987
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Title:
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ION SOURCE
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Patent #:
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Issue Dt:
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02/14/1989
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Application #:
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07142365
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Filing Dt:
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01/11/1988
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Title:
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ION IMPLANTATION SURFACE CHARGE CONTROL METHOD AND APPARATUS
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Patent #:
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Issue Dt:
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06/27/1989
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Application #:
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07159318
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Filing Dt:
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02/23/1988
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Title:
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MAGNETRON CATHODE FOR SPUTTER COATING
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Patent #:
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Issue Dt:
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11/28/1989
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Application #:
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07202141
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Filing Dt:
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06/03/1988
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Title:
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ELECTRON CYCLOTRON RESONANCE ION SOURCE
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Patent #:
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Issue Dt:
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08/28/1990
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Application #:
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07264591
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Filing Dt:
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10/31/1988
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Title:
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WAFER HANDLING APPARATUS
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Patent #:
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Issue Dt:
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01/02/1990
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Application #:
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07271241
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Filing Dt:
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11/14/1988
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Title:
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SKM ION SOURCE
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Patent #:
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Issue Dt:
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04/03/1990
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Application #:
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07293334
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Filing Dt:
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01/04/1989
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Title:
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UNIFORM CROSS SECTION ION BEAM SYSTEM
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Patent #:
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Issue Dt:
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12/04/1990
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Application #:
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07317224
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Filing Dt:
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02/28/1989
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Title:
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ION IMPLANTER END STATION
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Patent #:
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Issue Dt:
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07/24/1990
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Application #:
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07317225
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Filing Dt:
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02/28/1989
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Title:
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BEAM PATTERN CONTROL SYSTEM FOR AN ION IMPLANTER
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Patent #:
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Issue Dt:
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05/29/1990
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Application #:
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07317226
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Filing Dt:
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02/28/1989
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Title:
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WAFER ROTATION CONTROL FOR AN ION IMPLANTER
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Patent #:
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Issue Dt:
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01/29/1991
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Application #:
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07319257
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Filing Dt:
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03/03/1989
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Title:
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FLUID FLOW CONTROL METHOD AND APPARATUS FOR MINIMIZING PARTICLE CONTAMINATION
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Patent #:
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Issue Dt:
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06/25/1991
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Application #:
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07436296
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Filing Dt:
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11/13/1989
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Title:
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ELLIPTICAL ION BEAM DISTRIBUTION METHOD AND APPARATUS
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Patent #:
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Issue Dt:
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06/11/1991
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Application #:
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07487158
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Filing Dt:
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03/01/1990
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Title:
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ION BEAM CONTROL SYSTEM
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Patent #:
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Issue Dt:
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07/16/1991
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Application #:
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07585914
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Filing Dt:
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09/21/1990
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Title:
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FLUID FLOW CONTROL METHOD AND APPARATUS FOR MINIMIZING PARTICLE CONTAMINATION
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Patent #:
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Issue Dt:
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05/12/1992
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Application #:
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07647509
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Filing Dt:
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01/29/1991
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Title:
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ION BEAM POTENTIAL DETECTION PROBE
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Patent #:
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Issue Dt:
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02/25/1992
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Application #:
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07660738
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Filing Dt:
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02/25/1991
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Title:
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REDUCED PATH ION BEAM IMPLANTER
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Patent #:
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Issue Dt:
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07/28/1992
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Application #:
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07668955
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Filing Dt:
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03/13/1991
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Title:
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ION BEAM IMPLANTATION METHOD AND APPARATUS FOR PARTICULATE CONTROL
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Patent #:
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Issue Dt:
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11/17/1992
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Application #:
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07732778
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Filing Dt:
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07/19/1991
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Title:
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ION BEAM NEUTRALIZATION MEANS GENERATING DIFFUSE SECONDARY EMISSION ELECTRON SHOWER
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Patent #:
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Issue Dt:
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03/30/1993
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Application #:
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07767027
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Filing Dt:
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09/27/1991
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Title:
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ION BEAM PROFILING METHOD AND APPARATUS
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Patent #:
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Issue Dt:
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11/03/1992
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Application #:
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07804484
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Filing Dt:
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12/09/1991
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Title:
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METHOD AND APPARATUS FOR REDUCING TILT ANGLE VARIATIONS IN AN ION IMPLANTER
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Patent #:
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Issue Dt:
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06/08/1993
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Application #:
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07837277
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Filing Dt:
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02/18/1992
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Title:
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BROAD BEAM FLUX DENSITY CONTROL
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Patent #:
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Issue Dt:
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01/05/1993
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Application #:
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07846716
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Filing Dt:
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03/06/1992
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Title:
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ION BEAM IMPLANTER FOR PROVIDING CROSS PLANE FOCUSING
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Patent #:
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Issue Dt:
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07/20/1993
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Application #:
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07847766
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Filing Dt:
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03/05/1992
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Title:
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END STATION FOR A PARALLEL BEAM ION IMPLANTER
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Patent #:
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Issue Dt:
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08/31/1993
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Application #:
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07913731
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Filing Dt:
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07/15/1992
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Title:
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FLUID FLOW CONTROL METHOD AND APPARATUS FOR MINIMIZING PARTICLE CONTAMINATION
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Patent #:
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Issue Dt:
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05/03/1994
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Application #:
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07995155
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Filing Dt:
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12/22/1992
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Title:
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FLUID FLOW CONTROL METHOD AND APPARATUS FOR AN ION IMPLANTER
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Patent #:
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Issue Dt:
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07/25/1995
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Application #:
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08005030
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Filing Dt:
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01/15/1993
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Title:
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WAFER SENSING AND CLAMPING MONITOR
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Patent #:
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Issue Dt:
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08/22/1995
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Application #:
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08029154
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Filing Dt:
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03/10/1993
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Title:
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WAFER RELEASE METHOD AND APPARATUS
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Patent #:
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Issue Dt:
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04/11/1995
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Application #:
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08172441
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Filing Dt:
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12/22/1993
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Title:
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SCAN AND TILT APPARATUS FOR AN ION IMPLANTER
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Patent #:
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Issue Dt:
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07/11/1995
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Application #:
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08193436
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Filing Dt:
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02/08/1994
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Title:
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ION BEAM SCAN CONTROL
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Patent #:
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Issue Dt:
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12/13/1994
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Application #:
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08198548
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Filing Dt:
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02/18/1994
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Title:
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ION BEAM CONICAL SCANNING SYSTEM
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Patent #:
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Issue Dt:
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05/30/1995
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Application #:
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08267437
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Filing Dt:
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06/29/1994
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Title:
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STRUCTURE FOR ALIGNMENT OF AN ION SOURCE APERTURE WITH A PREDETERMINED ION BEAM PATH
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Patent #:
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Issue Dt:
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06/04/1996
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Application #:
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08312142
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Filing Dt:
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09/26/1994
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Title:
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MICROWAVE ENERGIZED ION SOURCE FOR ION IMPLANTATION
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Patent #:
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Issue Dt:
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03/05/1996
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Application #:
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08339554
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Filing Dt:
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11/15/1994
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Title:
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ION GENERATING SOURCE FOR USE IN AN ION IMPLANTER
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Patent #:
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Issue Dt:
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03/04/1997
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Application #:
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08458354
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Filing Dt:
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06/02/1995
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Title:
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ION IMPLANTATION DEVICE
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Patent #:
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Issue Dt:
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06/11/1996
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Application #:
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08465420
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Filing Dt:
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06/05/1995
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Title:
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AN ION IMPLANTATION DEVICE
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Patent #:
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Issue Dt:
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09/10/1996
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Application #:
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08503299
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Filing Dt:
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07/17/1995
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Title:
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IN SITU REMOVAL OF CONTAMINANTS FROM THE INTERIOR SURFACES OF AN ION BEAM IMPLANTER
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Patent #:
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Issue Dt:
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05/27/1997
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Application #:
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08519708
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Filing Dt:
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08/28/1995
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Title:
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METHOD AND APPARATUS FOR IN SITU REMOVAL OF CONTAMINANTS FROM ION BEAM NEUTRALIZATION AND IMPLANTATION APPARATUSES
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Patent #:
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Issue Dt:
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09/10/1996
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Application #:
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08545135
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Filing Dt:
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10/19/1995
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Title:
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METHOD AND APPARATUS FOR ION BEAM FORMATION IN AN ION IMPLANTER
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Patent #:
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Issue Dt:
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08/12/1997
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Application #:
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08574242
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Filing Dt:
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12/18/1995
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Title:
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APPARATUS FOR CAPTURING AND REMOVING CONTAMINANT PARTICLES FROM AN INTERIOR REGION OF AN ION IMPLANTER
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Patent #:
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Issue Dt:
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11/25/1997
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Application #:
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08589303
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Filing Dt:
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01/22/1996
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Title:
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METHOD AND APPARATUS FOR ION BEAM TRANSPORT
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Patent #:
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Issue Dt:
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08/26/1997
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Application #:
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08655448
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Filing Dt:
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05/30/1996
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Title:
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METHOD AND APPARATUS FOR ION FORMATION IN AN ION IMPLANTER
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Patent #:
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Issue Dt:
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12/30/1997
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Application #:
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08691467
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Filing Dt:
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08/02/1996
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Title:
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METHOD AND APPARATUS FOR ION BEAM NEUTRALIZATION
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Patent #:
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Issue Dt:
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04/07/1998
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Application #:
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08696122
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Filing Dt:
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08/13/1996
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Title:
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METHOD AND APPARATUS FOR ION BEAM FORMATION IN AN ION IMPLANTER
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Patent #:
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Issue Dt:
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10/13/1998
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Application #:
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08702257
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Filing Dt:
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08/23/1996
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Title:
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DUAL VERTICAL THERMAL PROCESSING FURNACE
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Patent #:
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Issue Dt:
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08/05/1997
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Application #:
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08728000
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Filing Dt:
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10/10/1996
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Title:
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PULSED PLATE PLASMA IMPLANTATION SYSTEM AND METHOD
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Patent #:
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Issue Dt:
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06/09/1998
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Application #:
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08740478
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Filing Dt:
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10/30/1996
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Title:
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CATHODE MOUNTING FOR ION SOURCE WITH INDIRECTLY HEATED CATHODE
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Patent #:
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Issue Dt:
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04/20/1999
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Application #:
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08753514
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Filing Dt:
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11/26/1996
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Title:
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ION BEAM SHIELD FOR IMPLANTATION SYSTEMS
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Patent #:
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Issue Dt:
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08/11/1998
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Application #:
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08756133
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Filing Dt:
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11/26/1996
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Title:
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ION IMPLANTATION SYSTEM FOR IMPLANTING WORKPIECES
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Patent #:
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Issue Dt:
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10/20/1998
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Application #:
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08756656
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Filing Dt:
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11/26/1996
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Title:
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LARGE AREA UNIFORM ION BEAM FORMATION
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Patent #:
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Issue Dt:
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06/02/1998
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Application #:
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08756970
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Filing Dt:
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11/26/1996
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Title:
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PLASMA CHAMBER FOR CONTROLLING ION DOSAGE IN ION IMPLANTATION
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Patent #:
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Issue Dt:
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10/27/1998
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Application #:
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08756972
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Filing Dt:
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11/26/1996
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Title:
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SYSTEM AND METHOD FOR COOLING WORKPIECES PROCESSED BY AN ION IMPLANTATION SYSTEM
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Patent #:
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Issue Dt:
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09/22/1998
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Application #:
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08757726
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Filing Dt:
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11/26/1996
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Title:
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CONTROL MECHANISMS FOR DOSIMETRY CONTROL IN ION IMPLANTATION SYSTEMS
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Patent #:
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Issue Dt:
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10/13/1998
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Application #:
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08760714
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Filing Dt:
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12/05/1996
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Title:
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ION SOURCE BLOCK FILAMENT WITH LAYBRINTH CONDUCTIVE PATH
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Patent #:
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Issue Dt:
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09/23/1997
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Application #:
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08762320
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Filing Dt:
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12/09/1996
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Title:
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METHOD FOR CAPTURING AND REMOVING CONTAMINANT PARTICLES FROM AN INTERIOR REGION OF AN ION IMPLANTER
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Patent #:
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Issue Dt:
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12/30/1997
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Application #:
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08775145
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Filing Dt:
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12/31/1996
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Title:
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ENDCAP FOR INDIRECTLY HEATED CATHODE OF ION SOURCE
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Patent #:
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Issue Dt:
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05/12/1998
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Application #:
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08779901
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Filing Dt:
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01/07/1997
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Title:
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LOADLOCK ASSEMBLY FOR AN ION IMPLANTATION SYSTEM
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Patent #:
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Issue Dt:
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06/15/1999
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Application #:
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08780808
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Filing Dt:
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01/09/1997
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Title:
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PLASMA IMMERSION IMPLANTATION WITH PULSED ANODE
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Patent #:
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Issue Dt:
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06/02/1998
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Application #:
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08785013
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Filing Dt:
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01/17/1997
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Title:
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DOSE CONTROL FOR USE IN AN ION IMPLANTER
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Patent #:
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Issue Dt:
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07/14/1998
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Application #:
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08841725
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Filing Dt:
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04/29/1997
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Title:
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ACCELERATOR-DECELERATOR ELECTROSTATIC LENS FOR VARIABLY FOCUSING AND MASS RESOLVING AN ION BEAM IN AN ION IMPLANTER
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Patent #:
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Issue Dt:
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01/30/2001
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Application #:
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08862019
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Filing Dt:
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05/22/1997
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Title:
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DUAL-WALLED EXHAUST TUBING FOR VACUUM PUMP
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Patent #:
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Issue Dt:
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05/04/1999
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Application #:
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08873351
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Filing Dt:
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06/11/1997
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Title:
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FURNACE SIDEWALL TEMPERATURE CONTROL SYSTEM
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Patent #:
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Issue Dt:
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10/05/1999
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Application #:
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08891415
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Filing Dt:
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07/10/1997
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Title:
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METHOD OF IMPLANTING LOW DOSES OF IONS INTO A SUBSTRATE
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Patent #:
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Issue Dt:
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09/29/1998
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Application #:
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08891688
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Filing Dt:
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07/11/1997
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Title:
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SYSTEM AND METHOD FOR NEUTRALIZING AN ION BEAM USING WATER VAPOR
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Patent #:
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Issue Dt:
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09/29/1998
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Application #:
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08900379
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Filing Dt:
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07/12/1997
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Title:
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SYSTEM AND METHOD FOR SETECING NEUTRAL PARTICLES IN AN ION BEAN
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Patent #:
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Issue Dt:
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06/01/1999
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Application #:
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08924969
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Filing Dt:
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09/08/1997
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Title:
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ION IMPLANTER ELECTRON SHOWER HAVING ENHANCED SECONDARY ELECTRON EMISSION
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Patent #:
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Issue Dt:
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05/11/1999
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Application #:
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08929180
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Filing Dt:
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09/08/1997
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Title:
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BIASED AND SERRATED EXTENSION TUBE FOR ION IMPLANTER ELECTRON SHOWER
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Patent #:
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Issue Dt:
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01/05/1999
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Application #:
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08931689
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Filing Dt:
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09/16/1997
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Title:
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FILAMENT FOR ION IMPLANTER PLASMA SHOWER
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Patent #:
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Issue Dt:
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01/18/2000
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Application #:
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09014472
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Filing Dt:
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01/28/1998
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Title:
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MAGNETIC FILTER FOR ION SOURCE
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Patent #:
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Issue Dt:
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05/09/2000
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Application #:
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09031423
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Filing Dt:
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02/26/1998
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Title:
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ION SOURCE HAVING WIDE OUTPUT CURRENT OPERATING RANGE
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Patent #:
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Issue Dt:
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10/24/2000
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Application #:
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09049642
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Filing Dt:
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03/27/1998
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Title:
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METHOD FOR IN-PROCESS CLEANING OF AN ION SOURCE
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Patent #:
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Issue Dt:
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02/15/2000
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Application #:
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09066180
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Filing Dt:
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04/23/1998
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Title:
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ION IMPLANTATION SYSTEM FOR IMPLANTING WORKPIECES
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Patent #:
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Issue Dt:
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08/22/2000
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Application #:
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09070685
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Filing Dt:
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04/30/1998
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Title:
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DECABORANE VAPORIZER
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Patent #:
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Issue Dt:
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09/25/2001
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Application #:
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09081545
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Filing Dt:
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05/19/1998
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Title:
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MULTI-CUSP ION SOURCE
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Patent #:
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Issue Dt:
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12/07/1999
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Application #:
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09095863
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Filing Dt:
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06/11/1998
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Title:
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ION DOSAGE MEASUREMENT APPARATUS FOR AN ION BEAM IMPLANTER AND METHOD
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Patent #:
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Issue Dt:
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09/28/1999
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Application #:
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09099997
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Filing Dt:
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06/19/1998
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Title:
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METHOD AND APPARATUS FOR MONITORING CHARGE NEUTRALIZATION OPERATION
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Patent #:
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Issue Dt:
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12/21/1999
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Application #:
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09123148
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Filing Dt:
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07/27/1998
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|
Title:
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MODULAR ACETABULAR RECONSTRUCTION PLATE
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Patent #:
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Issue Dt:
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03/20/2001
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Application #:
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09130662
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Filing Dt:
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08/07/1998
|
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Title:
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TOROIDAL FILAMENT FOR PLASMA GENERATION
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Patent #:
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|
Issue Dt:
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10/05/1999
|
Application #:
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09132591
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Filing Dt:
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08/11/1998
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Title:
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DUAL VERTICAL THERMAL PROCESSING FURNACE
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