Patent Assignment Details
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| Reel/Frame: | 010817/0540 | |
| Pages: | 3 |
| | Recorded: | 05/16/2000 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/25/2002
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Application #:
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09488021
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Filing Dt:
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01/20/2000
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Title:
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PROJECTION EXPOSURE METHOD, PROJECTION EXPOSURE APPARATUS AND METHODS OF MANUFACTURING AND OPTICALLY CLEANING THE EXPOSURE APPARATUS
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Assignee
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| 2-3, MARUNOUCHI 3-CHOME CHIYODA-KU |
| TOKYO, JAPAN 100-8 |
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Correspondence name and address
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ARMSTRONG, WESTERMAN, HATTORI MCLELAND
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& NAUGHTON
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1725 K STREET, N.W., SUITE 1000
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WASHINGTON, D.C. 20006
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