Patent Assignment Details
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Reel/Frame: | 010824/0551 | |
| Pages: | 3 |
| | Recorded: | 05/15/2000 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/13/2001
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Application #:
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09570195
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Filing Dt:
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05/15/2000
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Title:
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Method of forming film on semiconductor substrate in film-forming apparatus
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Assignee
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32-1, 6-CHOME, NAGAYAMA, TAMA-SHI |
TOKYO, JAPAN 206-0 |
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Correspondence name and address
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KNOBBE, MARTENS, OLSON, BEAR, LLP
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GORDON H. OLSON
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620 NEWPORT CENTER DRIVE
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16TH FLOOR
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NEWPORT BEACH, CA 92660
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