Patent Assignment Details
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| Reel/Frame: | 010858/0093 | |
| Pages: | 5 |
| | Recorded: | 05/30/2000 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/26/2002
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Application #:
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09584407
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Filing Dt:
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05/30/2000
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Title:
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Method of anisotropic plasma etching using non-chlorofluorocarbon, fluorine-based chemistry
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Assignee
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| 5750 NW PACIFIC RIM BOULEVARD |
| CAMAS, WASHINGTON 98607 |
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Correspondence name and address
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SHARP LABORATORIES OF AMERICA, INC.
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MATTHEW D. RABDAU
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5750 NW PACIFIC RIM BOULEVARD
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CAMAS, WASHINGTON 98607
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