Patent Assignment Details
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| Reel/Frame: | 010867/0292 | |
| Pages: | 3 |
| | Recorded: | 05/19/2000 | | |
| Conveyance: | CONFIRMATORY LICENSE (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/14/1999
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Application #:
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08942757
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Filing Dt:
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10/02/1997
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Title:
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METHOD AND APPARATUS FOR X-RAY AND EXTREME ULTRAVIOLET INSPECTION OF LITHOGRAPHY MASKS AND OTHER OBJECTS
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Assignee
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| 800 NORTH QUINCY STREET |
| OFFICE OF NAVAL RESEARCH |
| ARLINGTON, VIRGINIA 22217 |
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Correspondence name and address
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JEAN TRUMAN
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OFFICE OF NAVAL RESEARCH
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OFFICE OF COUNSEL
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800 NORTH QUINCY STREET
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ARLINGTON, VA 22217-5660
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Domestic representative
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A. DAVID SPEVACK
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OFFICE OF NAVAL RESEARCH
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OFFICE OF COUNSEL
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800 NORTH QUINCY STREET
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ARLINGTON VA 22217-56*0
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