Patent Assignment Details
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Reel/Frame: | 010873/0354 | |
| Pages: | 4 |
| | Recorded: | 06/15/2000 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/23/2002
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Application #:
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09595552
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Filing Dt:
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06/15/2000
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Title:
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CHARGED-PARTICLE-BEAM MICROLITHOGRAPHY APPARATUS AND METHODS INCLUDING CORRECTION OF STAGE-POSITIONING ERRORS USING A DEFLECTOR
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Assignee
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FUJI BUILDING, 2-3 MARUNOUCHI 3-CHOME, CHIYODA-KU |
TOKYO 100, JAPAN |
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Correspondence name and address
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KLARQUIST SPARKMAN CAMPBELL LEIGH &
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WHINSTON, LLP
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DONALD L. STEPHENS JR.
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121 S.W. SALMON STREET
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PORTLAND STATE OREGON 97204-2988
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