|
Total properties:
84
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/06/1983
|
Application #:
|
06024944
|
Filing Dt:
|
03/29/1979
|
|
Title:
|
SURFACE INSPECTION SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/08/1983
|
Application #:
|
06236840
|
Filing Dt:
|
02/23/1981
|
|
Title:
|
STEPPING MOTOR DRIVE CIRCUIT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/30/1983
|
Application #:
|
06320451
|
Filing Dt:
|
11/12/1981
|
|
Title:
|
PLASMA DEPOSITION OF SILICON
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/28/1985
|
Application #:
|
06363641
|
Filing Dt:
|
03/30/1982
|
|
Title:
|
SEMICONDUCTOR TESTING AND APPARATUS THEREFOR
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/30/1983
|
Application #:
|
06398066
|
Filing Dt:
|
07/14/1982
|
|
Title:
|
METHOD AND APPARATUS FOR ACHIEVING SPATIALLY UNIFORM EXTERNALLY EXCITED NON-THERMAL CHEMICAL REACTIONS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/29/1984
|
Application #:
|
06401936
|
Filing Dt:
|
07/26/1982
|
|
Title:
|
OBJECT DETECTION APPARATUS AND METHOD
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/01/1985
|
Application #:
|
06492545
|
Filing Dt:
|
05/09/1983
|
|
Title:
|
SPACER FOR PREVENTING SHORTING BETWEEN CONDUCTIVE PLATES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/10/1985
|
Application #:
|
06538411
|
Filing Dt:
|
10/05/1983
|
|
Title:
|
ARTICLE HANDLING APPARATUS AND METHOD
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/10/1985
|
Application #:
|
06547050
|
Filing Dt:
|
10/31/1983
|
|
Title:
|
METAL-SILICIDE DEPOSITION USING PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/30/1986
|
Application #:
|
06554978
|
Filing Dt:
|
11/23/1983
|
|
Title:
|
STABLE CONDUCTIVE ELEMENTS FOR DIRECT EXPOSURE TO REACTIVE ENVIRONMENTS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/09/1986
|
Application #:
|
06679898
|
Filing Dt:
|
12/10/1984
|
|
Title:
|
APPARATUS FOR PROCESSING SEMICONDUCTOR WAFERS OR THE LIKE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/24/1988
|
Application #:
|
06714194
|
Filing Dt:
|
03/20/1985
|
|
Title:
|
SEMICONDUCTOR TESTING AND APPARATUS THEREFOR
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/31/1987
|
Application #:
|
06784739
|
Filing Dt:
|
10/07/1985
|
|
Title:
|
METHOD AND APPARATUS FOR SUBSTRATE HEATING IN AN AXIALLY SYMMETRIC EPITAXIAL DEPOSITION APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/17/1988
|
Application #:
|
06855841
|
Filing Dt:
|
04/24/1986
|
|
Title:
|
VACUUM WAFER EXPANDER APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/24/1989
|
Application #:
|
07017778
|
Filing Dt:
|
02/20/1987
|
|
Title:
|
ELECTRODE BOAT APPARATUS FOR PROCESSING SEMICONDUCTOR WAFERS OR THE LIKE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/06/1988
|
Application #:
|
07031519
|
Filing Dt:
|
03/27/1987
|
|
Title:
|
METHOD AND APPARATUS FOR SUBSTRATE HEATING IN AN AXIALLY SYMMETRIC EPITAXIAL DEPOSITION APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/18/1989
|
Application #:
|
07032474
|
Filing Dt:
|
03/31/1987
|
|
Title:
|
ROTATABLE SUBSTRATE SUPPORTING MECHANISM WITH TEMPERATURE SENSING DEVICE FOR USE IN CHEMICAL VAPOR DEPOSITION EQUIPMENT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/21/1989
|
Application #:
|
07037098
|
Filing Dt:
|
04/09/1987
|
|
Title:
|
APPARATUS AND METHOD FOR AUTOMATED WAFER HANDLING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/06/1989
|
Application #:
|
07063409
|
Filing Dt:
|
06/18/1987
|
|
Title:
|
HEATING SYSTEM FOR REACTION CHAMBER OF CHEMICAL VAPOR DEPOSITION EQUIPMENT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/11/1989
|
Application #:
|
07065945
|
Filing Dt:
|
06/24/1987
|
|
Title:
|
REACTION CHAMBERS FOR CVD SYSTEMS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/22/1993
|
Application #:
|
07066019
|
Filing Dt:
|
06/24/1987
|
|
Title:
|
IMPROVED GAS INJECTORS FOR REACTION CHAMBERS IN CVD SYSTEMS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/09/1989
|
Application #:
|
07108771
|
Filing Dt:
|
10/15/1987
|
|
Title:
|
CHEMICAL VAPOR DEPOSITION SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/17/1989
|
Application #:
|
07147100
|
Filing Dt:
|
01/25/1988
|
|
Title:
|
APPARATUS AND METHOD FOR CHEMICAL VAPOR DEPOSITION USING AN AXIALLY SYMMETRIC GAS FLOW
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/17/1989
|
Application #:
|
07167347
|
Filing Dt:
|
03/14/1988
|
|
Title:
|
PROCESS FOR EPITAXIAL DEPOSITION OF SILICON
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/03/1992
|
Application #:
|
07315332
|
Filing Dt:
|
02/24/1989
|
|
Title:
|
SUBSTRATE LOADING APPARATUS FOR A CVD PROCESS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/04/1991
|
Application #:
|
07315723
|
Filing Dt:
|
02/24/1989
|
|
Title:
|
SUBSTRATE HANDLING AND TRANSPORTING APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/04/1990
|
Application #:
|
07319260
|
Filing Dt:
|
03/03/1989
|
|
Title:
|
HEATING SYSTEM FOR SUBSTRATES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/17/1992
|
Application #:
|
07329778
|
Filing Dt:
|
03/28/1989
|
|
Title:
|
METHOD FOR IMPROVING THE REACTANT GAS FLOW IN A REACTION CHAMBERS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/05/1991
|
Application #:
|
07330200
|
Filing Dt:
|
03/29/1989
|
|
Title:
|
ROTATABLE SUBSTRATE SUPPORTING SUSCIPTOR WITH TEMPERATURE SENSORS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/19/1991
|
Application #:
|
07339310
|
Filing Dt:
|
04/17/1989
|
|
Title:
|
SUSCEPTOR WITH TEMPERATURE SENSING DEVICE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/29/1991
|
Application #:
|
07354922
|
Filing Dt:
|
05/22/1989
|
|
Title:
|
HIGH THROUGHPUT MULTI STATION PROCESSOR FOR MULTIPLE SINGLE WAFERS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/03/1991
|
Application #:
|
07468630
|
Filing Dt:
|
01/23/1990
|
|
Title:
|
APPARATUS FOR IMPROVING THE REACTANT GAS FLOW IN A REACTION CHAMBER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/02/1992
|
Application #:
|
07539062
|
Filing Dt:
|
06/15/1990
|
|
Title:
|
DRIVE SHAFT APPARATUS FOR A SUSCEPTOR
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/14/1992
|
Application #:
|
07547463
|
Filing Dt:
|
07/02/1990
|
|
Title:
|
WAFER HANDLING SYSTEM WITH BERNOULLI PICK-UP
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/25/1992
|
Application #:
|
07587737
|
Filing Dt:
|
09/25/1990
|
|
Title:
|
METHOD FOR PROCESSING WAFERS IN A MULTI STATION COMMON CHAMBER REACTOR
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/29/1992
|
Application #:
|
07624320
|
Filing Dt:
|
12/12/1990
|
|
Title:
|
TRANSMISSION LINE FOR PROVIDING POWER TO AN ELECTRODE BOAT IN A PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/07/1994
|
Application #:
|
07655731
|
Filing Dt:
|
02/14/1991
|
|
Title:
|
SUBSTRATE SUPPORTING APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/30/1993
|
Application #:
|
07664867
|
Filing Dt:
|
03/04/1991
|
|
Title:
|
ROTATABLE SUBSTRATE SUPPORTING MECHANISM WITH TEMPERATURE SENSING DEVICE FOR USE IN CHEMICAL VAPOR DEPOSITION EQUIPMENT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/14/1993
|
Application #:
|
07695410
|
Filing Dt:
|
05/03/1991
|
|
Title:
|
APPARATUS FOR IMPROVING THE REACTANT GAS FLOW IN A REACTION CHAMBER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/20/1992
|
Application #:
|
07720750
|
Filing Dt:
|
06/25/1991
|
|
Title:
|
METHOD FOR LOADING A SUBSTRATE INTO A CVD APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/02/1995
|
Application #:
|
07782060
|
Filing Dt:
|
12/16/1991
|
|
Title:
|
GAS INJECTORS FOR REACTION CHAMBERS IN CVD SYSTEMS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/28/1994
|
Application #:
|
07819098
|
Filing Dt:
|
01/09/1992
|
|
Title:
|
WAFER HANDLING SYSTEM WITH BERNOULLI PICK-UP
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/27/1995
|
Application #:
|
07882309
|
Filing Dt:
|
05/13/1992
|
|
Title:
|
ROTATABLE SUBSTRATE SUPPORTING MECHANISM WITH TEMPERATURE SENSING DEVICE FOR USE IN CHEMICAL VAPOR DEPOSITION EQUIPMENT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/16/1993
|
Application #:
|
07882844
|
Filing Dt:
|
05/14/1992
|
|
Title:
|
REACTION CHAMBERS FOR CVD SYSTEMS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/20/1994
|
Application #:
|
08133659
|
Filing Dt:
|
10/07/1993
|
|
Title:
|
ROTATABLE SUBSTRATE SUPPORTING MECHANISM WITH TEMPERATURE SENSING DEVICE FOR USE IN CHEMICAL VAPOR DEPOSITION EQUIPMENT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/17/1995
|
Application #:
|
08171265
|
Filing Dt:
|
12/21/1993
|
|
Title:
|
GAS INJECTORS FOR REACTION CHAMBERS IN CVD SYSTEMS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/25/1995
|
Application #:
|
08255114
|
Filing Dt:
|
06/07/1994
|
|
Title:
|
CHEMICAL VAPOR DESPOSITION SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/12/1996
|
Application #:
|
08451926
|
Filing Dt:
|
05/26/1995
|
|
Title:
|
METHOD OF MAKING A QUARTZ DOME REACTOR CHAMBER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/11/1999
|
Application #:
|
08513321
|
Filing Dt:
|
08/10/1995
|
|
Title:
|
ROTATABLE SUBSTRATE SUPPORTING MECHANISM WITH TEMPERATURE SENSING DEVICE FOR USE IN CHEMICAL VAPOR DEPOSITION EQUIPMENT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/11/1996
|
Application #:
|
08514420
|
Filing Dt:
|
08/11/1995
|
|
Title:
|
GAS INJECTORS FOR REACTION CHAMBERS IN CVD SYSTEMS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/11/2000
|
Application #:
|
08621627
|
Filing Dt:
|
03/26/1996
|
|
Title:
|
LOW-MASS SUSCEPTOR
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/25/2000
|
Application #:
|
08637616
|
Filing Dt:
|
04/25/1996
|
|
Title:
|
PROCESS CHAMBER WITH INNER SUPPORT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/13/1998
|
Application #:
|
08661461
|
Filing Dt:
|
06/11/1996
|
|
Title:
|
GAS INJECTION SYSTEM FOR REACTION CHAMBERS IN CVD SYSTEMS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/25/2000
|
Application #:
|
08706069
|
Filing Dt:
|
08/30/1996
|
|
Title:
|
WAFER SUPPORT SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/07/1999
|
Application #:
|
08729550
|
Filing Dt:
|
10/11/1996
|
|
Title:
|
SEMICONDUCTOR PROCESSING SYSTEM WITH GAS CURTAIN
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/01/2002
|
Application #:
|
08783815
|
Filing Dt:
|
01/13/1997
|
|
Title:
|
TUNGSTEN SILICIDE DEPOSITION PROCESS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/03/2000
|
Application #:
|
08911865
|
Filing Dt:
|
08/15/1997
|
|
Title:
|
METHOD AND SYSTEM FOR ADJUSTING SEMICONDUCTOR PROCESSING EQUIPMENT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/05/2000
|
Application #:
|
08923241
|
Filing Dt:
|
09/04/1997
|
|
Title:
|
WAFER SUPPORT SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/30/2000
|
Application #:
|
08976537
|
Filing Dt:
|
11/21/1997
|
|
Title:
|
SUBSTRATE TRANSFER SYSTEM FOR SEMICONDUCTOR PROCESSING EQUIPMENT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/06/2001
|
Application #:
|
09006325
|
Filing Dt:
|
01/14/1998
|
|
Title:
|
DUAL ARM LINEAR HAND-OFF WAFER TRANSFER ASSEMBLY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/19/2000
|
Application #:
|
09083833
|
Filing Dt:
|
05/22/1998
|
|
Title:
|
STACKABLE CASSETTE FOR USE WITH WAFER CASSETTES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/01/2000
|
Application #:
|
09110541
|
Filing Dt:
|
07/06/1998
|
|
Title:
|
REFLECTIVE SURFACE FOR CVD REACTOR WALLS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/13/2000
|
Application #:
|
09110544
|
Filing Dt:
|
07/06/1998
|
|
Title:
|
SUBSTRATE COOLING SYSTEM AND METHOD
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/12/2000
|
Application #:
|
09113441
|
Filing Dt:
|
07/10/1998
|
|
Title:
|
WAFER CARRIER AND METHOD FOR HANDLING OF WAFERS WITH MINIMAL CONTACT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/19/2000
|
Application #:
|
09113767
|
Filing Dt:
|
07/10/1998
|
|
Title:
|
MULTI-POSITION LOAD LOCK CHAMBER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/29/2000
|
Application #:
|
09150986
|
Filing Dt:
|
09/10/1998
|
|
Title:
|
METHOD AND APPARATUS FOR COOLING SUBSTRATES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/04/2001
|
Application #:
|
09184490
|
Filing Dt:
|
11/02/1998
|
|
Title:
|
LONG LIFE HIGH TEMPERATURE PROCESS CHAMBER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/19/2000
|
Application #:
|
09184491
|
Filing Dt:
|
11/02/1998
|
|
Title:
|
METHOD OF PROCESSING WAFERS WITH LOW MASS SUPPORT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/25/2001
|
Application #:
|
09193991
|
Filing Dt:
|
11/17/1998
|
|
Title:
|
SUBSTRATE TRANSFER SYSTEM FOR SEMICONDUCTOR PROCESSING EQUIPMENT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/07/2000
|
Application #:
|
09195793
|
Filing Dt:
|
11/19/1998
|
|
Title:
|
COMPACT PROCESS CHAMBER FOR IMPROVED PROCESS UNIFORMITY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/15/2004
|
Application #:
|
09227679
|
Filing Dt:
|
01/08/1999
|
|
Title:
|
IN SITU GROWTH OF OXIDE AND SILICON LAYERS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/20/2001
|
Application #:
|
09256743
|
Filing Dt:
|
02/24/1999
|
|
Title:
|
WAFER CARRIER AND METHOD FOR HANDLING OF WAFERS WITH MINIMAL CONTACT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/15/2001
|
Application #:
|
09264167
|
Filing Dt:
|
03/05/1999
|
|
Title:
|
METHOD OF DEPOSITING SILICON WITH HIGH STEP COVERAGE
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Patent #:
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Issue Dt:
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03/28/2000
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Application #:
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09277662
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Filing Dt:
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03/26/1999
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Title:
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MULTI-STAGE SINGLE-DRIVE FOUP DOOR OPENING SYSTEM
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Patent #:
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Issue Dt:
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04/22/2003
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Application #:
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09395795
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Filing Dt:
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09/14/1999
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Title:
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BELLOWS ISOLATION FOR INDEX PLATFORMS
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Patent #:
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Issue Dt:
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06/05/2001
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Application #:
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09434030
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Filing Dt:
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11/04/1999
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Title:
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WAFER HOLDER
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Patent #:
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Issue Dt:
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11/20/2001
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Application #:
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09437069
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Filing Dt:
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11/09/1999
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Title:
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REFLECTIVE SURFACE FOR CVD REACTOR WALLS
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Patent #:
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Issue Dt:
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04/03/2001
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Application #:
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09438200
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Filing Dt:
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11/11/1999
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Title:
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METHOD AND APPARATUS FOR COOLING SUBSTRATES
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Patent #:
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Issue Dt:
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06/03/2003
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Application #:
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09443552
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Filing Dt:
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11/18/1999
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Title:
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EXHAUST SYSTEM FOR VAPOR DEPOSITION REACTOR AND METHOD OF USING SAME
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Patent #:
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Issue Dt:
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07/10/2001
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Application #:
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09454377
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Filing Dt:
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12/03/1999
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Title:
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PROCESS CHAMBER COOLING
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Patent #:
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Issue Dt:
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03/20/2001
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Application #:
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09480918
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Filing Dt:
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01/11/2000
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Title:
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Wafer support system
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Patent #:
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Issue Dt:
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12/18/2001
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Application #:
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09483604
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Filing Dt:
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01/14/2000
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Title:
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GRIDDED SUBSTRATE TRANSPORT SPATULA
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Patent #:
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Issue Dt:
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02/20/2001
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Application #:
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09495765
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Filing Dt:
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02/01/2000
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Title:
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System of controlling the temperature of a processing chamber
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Patent #:
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Issue Dt:
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04/29/2003
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Application #:
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09550680
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Filing Dt:
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04/17/2000
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Title:
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ROTATING SEMICONDUCTOR PROCESSING APPARATUS
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