Patent Assignment Details
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| Reel/Frame: | 010896/0059 | |
| Pages: | 3 |
| | Recorded: | 06/27/2000 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/07/2003
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Application #:
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09605562
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Filing Dt:
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06/27/2000
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Title:
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METHOD AND SYSTEM FOR DETECTING AN EXPOSURE OF A MATERIAL ON A SEMICONDUCTOR WAFER DURING CHEMICAL-MECHANICAL POLISHING
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Assignee
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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Correspondence name and address
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BRINKS HOFER GILSON & LIONE
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JOSEPH F. HETZ
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P.O.BOX 10395
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CHICAGO, IL 60610
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