Patent Assignment Details
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| Reel/Frame: | 010914/0854 | |
| Pages: | 2 |
| | Recorded: | 07/05/2000 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/26/2002
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Application #:
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09610702
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Filing Dt:
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07/05/2000
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Title:
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Semiconductor device manufacturing apparatus and control method therefor
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Assignee
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| 2-3, MARUNOUCHI 2-CHOME CHIYODA-KU |
| TOYKO 100-8310, JAPAN |
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Correspondence name and address
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MCDERMOTT, WILL & EMERY
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STEPHEN A. BECKER
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600 13TH STREET, N.W.
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WASHINGTON, DC 20005
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