Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
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| Reel/Frame: | 010975/0609 | |
| Pages: | 5 |
| | Recorded: | 06/29/2000 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/18/2001
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Application #:
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09607155
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Filing Dt:
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06/29/2000
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Title:
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Method for heating a semiconductor wafer in a process chamber by a shower head, and process chamber
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Assignees
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| INTELLECTUAL PROPERTY DEPT. |
| 1303 EAST ALGONQUIN ROAD |
| SCHAUMBURG, ILLINOIS 60196 |
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| INTELLECTUAL PROPERTY DEPT. |
| MANFRED-V.-ARDENNE-RING 20, BUILDING D |
| 01099 DRESDEN, GERMANY |
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| INTELLECTUAL PROPERTY DEPT. |
| SANKT-MARTIN-STR. 53 |
| 81541 MUNCHEN, GERMANY |
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Correspondence name and address
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MOTOROLA, INC.
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ROBERT A. RODRIGUEZ
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AUSTIN INTELLECTUAL PROPERTY LAW SECTION
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7700 WEST PARMER LANE
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AUSTIN, TEXAS 78729
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