Patent Assignment Details
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| Reel/Frame: | 010982/0530 | |
| Pages: | 7 |
| | Recorded: | 06/21/2000 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/23/2001
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Application #:
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09599143
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Filing Dt:
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06/21/2000
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Title:
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Methods of selectively etching polysilicon relative to at least one of deposited oxide, thermally grown oxide and nitride, and methods of selectively etching polysilicon relative to BPSG
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Assignee
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| 8000 SOUTH FEDERAL WAY |
| BOISE, IDAHO 83716 |
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Correspondence name and address
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WELLS, ST. JOHN, ROBERTS, GREGORY ET AL
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MARK S. MATKIN
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601 W. FIRST AVENUE, SUITE 1300
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SPOKANE, WA 99201-3828
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