Patent Assignment Details
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| Reel/Frame: | 011011/0482 | |
| Pages: | 4 |
| | Recorded: | 08/11/2000 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/01/2003
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Application #:
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09638200
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Filing Dt:
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08/11/2000
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Title:
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METHODS FOR CHARGED-PARTICLE-BEAM MICROLITHOGRAPHY INCLUDING CORRECTION OF DEFLECTION ABERRATIONS, AND DEVICE-MANUFACTURING METHODS COMPRISING SAME
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Assignee
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| CHIYOD-KU |
| FUJI BUILDING, 2-3 MARUNOUCHI 3-CHOME |
| TOKYO 100, JAPAN |
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Correspondence name and address
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KLARQUIST SPARKMAN CAMPBELL LEIGH ET AL.
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DONALD L. STEPHENS JR.
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ONE WORLD TRADE CENTER, SUITE 1600
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121 S.W. SALMON STREET
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PORTLAND, OREGON 97204-2988
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