Patent Assignment Details
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Reel/Frame: | 011014/0677 | |
| Pages: | 4 |
| | Recorded: | 08/16/2000 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/19/2002
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Application #:
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09640488
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Filing Dt:
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08/16/2000
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Title:
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TWO STEP PLASMA ETCH USING VARIABLE ELECTRODE SPACING
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Assignee
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SCIENCE-BASED INDUSTRIAL PARK |
19 LI-HSIN ROAD |
HSINCHU, TAIWAN R.O.C |
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Correspondence name and address
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BLAKELY SOKOLOFF TAYLOR & ZAFMAN, LLP
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CHUN M. NG
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12400 WILSHIRE BLVD.
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7TH FLOOR
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LOS ANGELES, CA 90025
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