Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 011052/0572 | |
| Pages: | 21 |
| | Recorded: | 08/23/2000 | | |
| Conveyance: | PATENT ASSIGNMENT AND SECURITY AGREEMENT |
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Total properties:
8
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Patent #:
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Issue Dt:
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10/21/1986
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Application #:
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06745291
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Filing Dt:
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06/14/1985
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Title:
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TOMOGRAPHY
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Patent #:
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Issue Dt:
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12/01/1987
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Application #:
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06767611
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Filing Dt:
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08/20/1985
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Title:
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OPTICAL SCATTEROMETER HAVING IMPROVED SENSITIVITY AND BANDWIDTH
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Patent #:
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Issue Dt:
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08/31/1993
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Application #:
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07591452
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Filing Dt:
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10/01/1990
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Title:
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TWO-DIMENSIONAL OPTICAL SCATTEROMETER APPARATUS AND PROCESS
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Patent #:
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Issue Dt:
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12/30/1997
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Application #:
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08510990
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Filing Dt:
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08/03/1995
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Title:
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LENS SCATTEROMETER SYSTEM EMPLOYING SOURCE LIGHT BEAM SCANNING MEANS
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Patent #:
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Issue Dt:
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08/18/1998
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Application #:
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08525767
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Filing Dt:
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01/26/1996
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Title:
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METHOD AND APPARATUS FOR MAPPING OF SEMICONDUCTOR MATERIALS
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Patent #:
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Issue Dt:
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02/02/1999
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Application #:
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08814736
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Filing Dt:
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03/07/1997
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Title:
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METHOD FOR BROAD WAVELENGTH SCATTEROMETRY
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Patent #:
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Issue Dt:
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09/26/2006
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Application #:
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09254521
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Filing Dt:
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03/08/1999
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Title:
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MICRO DEFECTS IN SEMI-CONDUCTORS
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Patent #:
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Issue Dt:
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06/05/2001
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Application #:
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09294247
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Filing Dt:
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04/19/1999
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Title:
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METHOD AND APPARATUS FOR NON-DESTRUCTIVE DETERMINATION OF FILM THICKNESS AND DOPANT CONCENTRATION USING FOURIER TRANSFORM INFRARED SPECTROMETRY
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Assignee
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| 100 FEDERAL STREET |
| BOSTON, MASSACHUSETTS 02110 |
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Correspondence name and address
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BINGHAM DANA LLP
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SANDRA J. VREJAN
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150 FEDERAL STREET
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BOSTON, MASSACHUSETTS 02110
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