Patent Assignment Details
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| Reel/Frame: | 011078/0981 | |
| Pages: | 4 |
| | Recorded: | 08/28/2000 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/24/2002
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Application #:
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09563035
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Filing Dt:
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05/01/2000
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Title:
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INTERFACE CONTROL FOR FILM DEPOSITION BY GAS-CLUSTER ION-BEAM PROCESSING
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Assignee
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| 37 MANNING ROAD |
| BILLERICA, MASSACHUSETTS 01821 |
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Correspondence name and address
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PERKINS, SMITH & COHEN, LLP
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JACOB N. ERLICH, ESQ.
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ONE BEACON ST., 30TH FLOOR
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BOSTON, MASSACHUSETTS 02109
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