Patent Assignment Details
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| Reel/Frame: | 011093/0869 | |
| Pages: | 4 |
| | Recorded: | 09/11/2000 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/30/2003
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Application #:
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09659205
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Filing Dt:
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09/11/2000
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Title:
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METHODS AND DEVICES FOR CALIBRATING A CHARGED-PARTICLE-BEAM MICROLITHOGRAPHY APPARATUS, AND MICROELECTRONIC-DEVICE FABRICATION METHODS COMPRISING SAME
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Assignee
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| FUJI BUILDING, 2-3 MARUNOUCHI 3-CHOME |
| CHIYODA-KU, TOKYO 100, JAPAN |
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Correspondence name and address
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KLARQUIST SPARKMAN CAMPBELL LEIGH ET AL
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DONALD L. STEPHENS JR.
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ONE WORLD TRADE CENTER, SUITE 1600
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121 S. W. SALMON STREET
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PORTLAND, OREGON 97204-2988
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