Patent Assignment Details
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| Reel/Frame: | 011099/0180 | |
| Pages: | 4 |
| | Recorded: | 09/18/2000 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/31/2002
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Application #:
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09527562
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Filing Dt:
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03/16/2000
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Title:
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PLASMA DEPOSITION APPARATUS AND METHOD WITH CONTROLLER
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Assignees
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| 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO-TO, JAPAN |
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| FURO-CHO, CHIKUSA-KU, NAGOYA-SHI |
| AICHI-KEN, JAPAN |
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Correspondence name and address
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FINNEGAN, HENDERSON, FARABOW, ET AL.
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MR. ERNEST F. CHAPMAN
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1300 I STREET, N.W.
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WASHINGTON, DC 20005-3315
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