Patent Assignment Details
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| Reel/Frame: | 011104/0326 | |
| Pages: | 2 |
| | Recorded: | 09/18/2000 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/23/2002
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Application #:
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09663646
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Filing Dt:
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09/18/2000
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Title:
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USE OF ACOUSTIC SPECTRAL ANALYSIS FOR MONITORING/CONTROL OF CMP PROCESSES
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Assignee
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| 1310 ELECTRONICS DRIVE |
| CARROLLTON, TEXAS 75006 |
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Correspondence name and address
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FELSMAN, BRADLEY, VADEN, GUNTER ET AL
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DAN VENGLARIK
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201 MAIN STREET, SUITE 1600
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FORT WORTH, TX 76102
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