Patent Assignment Details
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Reel/Frame: | 011138/0097 | |
| Pages: | 2 |
| | Recorded: | 09/22/2000 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/25/2003
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Application #:
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09668667
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Filing Dt:
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09/22/2000
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Title:
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APPARATUS AND METHODS FOR CONTROLLING RETAINING RING AND WAFER HEAD TILT FOR CHEMICAL MECHANICAL POLISHING
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Assignee
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4650 CUSHING PARKWAY |
FREMONT, CALIFORNIA 94538 |
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Correspondence name and address
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MARTINE PENILLA & KIM, LLP
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CHESTER E. MARTINE, JR.
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710 LAKEWAY DRIVE
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SUITE 170
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SUNNYVALE, CA 94085
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