Patent Assignment Details
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| Reel/Frame: | 011271/0948 | |
| Pages: | 3 |
| | Recorded: | 11/01/2000 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/06/2001
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Application #:
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09519879
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Filing Dt:
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03/06/2000
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Title:
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Method of detecting end point of polishing of wafer and apparatus for detecting end point of polishing
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Assignee
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| YOKOHAMA-SHI |
| 2-7-3, MINOWA-CHO, KOHOKU-KU |
| KANAGAWA 223-8533, JAPAN |
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Correspondence name and address
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OBLON, SPIVAK, MCCLELAND, MAIER ET AL
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NORMAN F. OBLON
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FOURTH FLOOR
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1755 JEFFERSON DAVIS HIGHWAY
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ARLINGTON, VIRGINIA 22202
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