Patent Assignment Details
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| Reel/Frame: | 011317/0633 | |
| Pages: | 3 |
| | Recorded: | 11/21/2000 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/02/2002
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Application #:
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09721060
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Filing Dt:
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11/21/2000
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Title:
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Apparatus for cleaning a semiconductor process chamber
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Assignee
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| P.O. BOX 450A |
| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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APPLIED MATERIALS, INC.
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ROBERT W. MULCAHY
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PATENT COUNSEL
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P.O. BOX 450A
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SANTA CLARA, CA 95052
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