Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
|
| Reel/Frame: | 011321/0519 | |
| Pages: | 4 |
| | Recorded: | 11/22/2000 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
|
|
Total properties:
1
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/08/2003
|
Application #:
|
09653824
|
Filing Dt:
|
09/01/2000
|
|
Title:
|
METHODS AND DEVICES FOR DETERMINING TIMES FOR MAINTENANCE ACTIVITY PERFORMED ON A CHARGED-PARTICLE-BEAM MICROLITHOGRAPHY APPARATUS, AND MICROELECTRONIC-DEVICE-MANUFACTURING METHODS COMPRISING SAME
|
|
|
Assignee
|
|
|
|
|
| MARUNOUCHI 3-CHOME, CHIYODA-KU |
| FUJI BUILDING, 2-3 |
| TOKYO, 100, JAPAN |
|
|
Correspondence name and address
|
| |
KLARQUIST SPARKMAN CAMPBELL ET AL.
|
| |
DONALD L. STEPHENS JR.
|
| |
121 S.W. SALMON STREET
|
| |
PORTLAND, OR 97204-2988
|
Search Results as of:
04/24/2024 07:04 PM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|
