Patent Assignment Details
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Reel/Frame: | 011362/0744 | |
| Pages: | 3 |
| | Recorded: | 12/12/2000 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/09/2001
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Application #:
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09735150
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Filing Dt:
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12/12/2000
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Publication #:
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Pub Dt:
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06/28/2001
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Title:
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Substrate processing apparatus and substrate processing method
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Assignee
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3-6, AKASAKA 5-CHOME |
MINATO-KU, TOKYO-TO, JAPAN |
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Correspondence name and address
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MORRISON & FOERSTER LLP
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DAVID L. FEHRMAN
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555 WEST FIFTH STREET
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SUITE 3500
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LOS ANGELES, CA 90013-1024
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