Patent Assignment Details
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| Reel/Frame: | 011376/0978 | |
| Pages: | 2 |
| | Recorded: | 11/17/2000 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/16/2004
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Application #:
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09714183
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Filing Dt:
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11/17/2000
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Title:
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ABERRATION MEASURING APPARATUS, ABERRATION MEASURING METHOD, PROJECTION EXPOSURE APPARATUS HAVING THE SAME MEASURING APPARATUS, DEVICE MANUFACTURING METHOD USING THE SAME MEASURING METHOD, AND EXPOSURE METHOD
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Assignee
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| 2-3, MARUNOUCHI 3-CHOME |
| CHIYODA-KU, TOKYO, JAPAN |
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Correspondence name and address
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MITCHEL W. SHAPIRO
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1828 L STREET, NW
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ELEVENTH FLOOR
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WASHINGTON, DC 20036
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