Patent Assignment Details
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| Reel/Frame: | 011484/0045 | |
| Pages: | 3 |
| | Recorded: | 01/18/2001 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/18/2004
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Application #:
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09764523
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Filing Dt:
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01/18/2001
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Publication #:
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Pub Dt:
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01/31/2002
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Title:
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SEMICONDUCTOR-PROCESSING DEVICE PROVIDED WITH A REMOTE PLASMA SOURCE FOR SELF-CLEANING
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Assignee
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| 23-1, 6-CHOME, NAGAYAMA, TAMA-SHI |
| TOKYO 206-0025, JAPAN |
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Correspondence name and address
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KNOBBE, MARTENS, OLSON & BEAR LLP
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ADEEL S. AKHTAR
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SIXTEENTH FLOOR
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620 NEWPORT CENTER DRIVE
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NEWPORT BEACH, CA 92660
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