Patent Assignment Details
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Reel/Frame: | 011537/0534 | |
| Pages: | 7 |
| | Recorded: | 02/06/2001 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/20/2001
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Application #:
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09777380
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Filing Dt:
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02/06/2001
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Title:
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Chemical-mechanical polishing system and method for integrated spin dry-film thickness measurement
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Assignee
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NEW ORCHARD ROAD |
ARMONK, NEW YORK 10504 |
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Correspondence name and address
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MCGINN & GIBB, PLLC
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CHRISTOPHER N. SEARS
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8321 OLD COURTHOUSE ROAD
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SUITE 200
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VIENNA VA 22182-3817
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