Patent Assignment Details
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Reel/Frame: | 011543/0774 | |
| Pages: | 6 |
| | Recorded: | 02/27/2001 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/04/2003
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Application #:
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09692150
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Filing Dt:
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10/20/2000
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Title:
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DEVICE AND METHOD FOR SUPPRESSING SPACE CHARGE INDUCED ABERRATIONS IN CHARGED-PARTICLE PROJECTION LITHOGRAPHY SYSTEMS
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Assignees
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600 MOUNTAIN AVENUE |
MURRAY HILL, NEW JERSEY 07974 |
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MURRAY HILL OFFICE CENTER |
571 CENTRAL AVENUE, SUITE 105 |
NEW PROVIDENCE, NEW JERSEY 07974 |
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Correspondence name and address
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PILLSBURY WINTHROP LLP
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HENRY J. DALEY
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1100 NEW YORK AVENUE, NW
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NINTH FLOOR
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WASHINGTON, DC 20005-3918
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