Patent Assignment Details
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| Reel/Frame: | 011632/0542 | |
| Pages: | 3 |
| | Recorded: | 03/26/2001 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/26/2001
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Application #:
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09453886
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Filing Dt:
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02/22/2000
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Title:
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Method of removing accumulated films from the surface of substrate holders in film deposition apparatus, and film deposition apparatus
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Assignee
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| FUCHU-SHI |
| 8-1 YOTSUYA 5-CHOME |
| TOKYO 183, JAPAN |
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Correspondence name and address
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BURNS, DOANE, SWECKER & MATHIS, LLP
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PLATON N. MANDROS
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P.O. BOX 1404
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ALEXANDRIA, VA 22313-1404
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