Patent Assignment Details
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| Reel/Frame: | 011639/0838 | |
| Pages: | 4 |
| | Recorded: | 03/27/2001 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/03/2003
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Application #:
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09749962
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Filing Dt:
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12/27/2000
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Publication #:
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Pub Dt:
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09/06/2001
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Title:
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CHARGED-PARTICLE-BEAM MICROLITHOGRAPHY METHODS FOR EXPOSING A SEGMENTED RETICLE
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Assignee
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| FUJI BUILDING, 2-3 MARUNOUCHI 3-CHOME |
| CHIYODA-KU, TOKYO 100, JAPAN |
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Correspondence name and address
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KLARQUIST SPARKMAN CAMPBELL LEIGH &
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WHINSTON, LLP, DONALD S. STEPHENS JR.
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121 S.W. SALMON STREET, ONE WORLD TRADE
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CENTER, SUITE 1600
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PORTLAND, OREGON 97204-2988
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