Patent Assignment Details
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| Reel/Frame: | 011653/0206 | |
| Pages: | 9 |
| | Recorded: | 03/07/2001 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/06/2004
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Application #:
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09800876
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Filing Dt:
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03/07/2001
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Title:
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SHAPING A PLASMA WITH A MAGNETIC FIELD TO CONTROL ETCH RATE UNIFORMITY
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Assignee
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| LEGAL AFFAIRS DEPARTMENT, MAIL STOP 2061 |
| P.O. BOX 450A |
| SANTA CLARA, CALIFORNIA 95052 |
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Correspondence name and address
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APPLIED MATERIALS, INC.
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ROBERT W. MULCAHY, PATENT COUNSEL
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LEGAL AFFAIRS DEPARTMENT, M/S 2061
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P.O. BOX 450A
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SANTA CLARA, CALIFORNIA 95052
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