Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 011671/0622 | |
| Pages: | 2 |
| | Recorded: | 03/29/2001 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/20/2004
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Application #:
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09823151
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Filing Dt:
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03/29/2001
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Publication #:
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Pub Dt:
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12/19/2002
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Title:
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APPARATUS AND METHODS WITH RESOLUTION ENHANCEMENT FEATURE FOR IMPROVING ACCURACY OF CONVERSION OF REQUIRED CHEMICAL MECHANICAL POLISHING PRESSURE TO FORCE TO BE APPLIED BY POLISHING HEAD TO WAFER
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Assignee
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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Correspondence name and address
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MARTINE PENILLA & KIM, LLP
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CHESTER E. MARTINE J.R
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710 LAKEWAY DR, STE 170
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SUNNYVALE, CA 94085
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